ISO/TC 229 Nanotechnologies has been developing technical documents on manufacturing at the nanoscale. Nanomanufacturing and nanomanufacturing process are defined in the first part of the joint ISO/IEC 80004 series on nanotechnology vocabulary;

2.11 nanomanufacturing

Intentional synthesis, generation or control of nanomaterials, or fabrication steps in the nanoscale, for commercial purposes

2.12 nanomanufacturing process

Ensemble of activities to intentionally synthesise, generate or control nanomaterials, or fabrication steps in the nanoscale, for commercial purposes

Document ISO/TS 80004-8:2013 Nanotechnologies — Vocabulary — Part 8: Nanomanufacturing processes supports these definitions and gives ‘terms and definitions related to nanomanufacturing processes in the field of nanotechnologies’.

The International Electrotechnical Commission (IEC) is developing series of technical specifications on nanomanufacturing. The 62565 series covers material specifications and the 62607 series covers key control characteristics. Together with the Institute of Electrical and Electronics Engineers (IEEE), IEC is also writing a document dedicated to nanoelectronics: IEC/IEEE 62659 Nanomanufacturing - Large scale manufacturing for nanoelectronics

In Europe, CEN/TC 352 Nanotechnology has not developed standards relevant to manufacturing.